Profile
Hollow cathode gas plasma sources
Mainly used for PEALD, Meaglow’s patented hollow cathode gas plasma technology has now been sold in 16 countries, with over 190 units produced. The hollow cathodes are metal based with the high plasma density of ICP and microwave sources, but without the oxygen contamination of those legacy sources. There is no dielectric window that is erodes as source of oxygen.
Products and Services
Hollow cathode plasma sources, from the very small to 16” diameter and larger. Custom and standard units available. A scalable technology with high radical production.
Website
meaglow.comContact
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Dr. K. Scott Butcher, President and Chief ScientistTel: +1 807-252-4391Email: sbutcher@meaglow.com
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Event details
Date: August 31 - September 4, 2026
Event contact
Lisa Qi
Senior International Market Consultant
Greater China, Australia & New Zealand
Tel: +1 416-843-4382
Email: lisa.qi@ontario.ca
Participants
9 in total
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